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Smoothing and surface planarization of sacrificial layers in MEMS technology

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4 Author(s)

In this work we present a novel technology for tailoring the edges of a polymer sacrificial layer by combining multiple techniques. Standard polymers like Shipley Microposit S1818 for the sacrificial layers and gold as a structural layer have been used for our purposes. As a result, oblique profiles of double clamped bridges have been obtained, characterized by an improved homogeneity of the deposited metal thickness on the edges and by a very good surface planarity.

Published in:

Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on

Date of Conference:

25-27 April 2012