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Reduction of initial stress stiffening by topology optimization

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4 Author(s)

Topology optimization is a rigorous method of obtaining non-intuitive designs. We use it to obtain a capacitive RF switch that stiffens little in response to an increase of the in-plane biaxial stresses that typically develop during MEMS fabrication. The actuation voltage is closely related to the membrane's stiffness, and is more stable for a stress insensitive switch. We employ the Solid Isotropic Material with Penalization (SIMP) method with the Method of Moving Asymptotes (MMA) and a robust formulation to minimize the ratio between the compliance at a low stress level and that at a high stress level. We include a volume constraint and a compliance constraint. Topology optimized designs are compared to an intuitively-designed RF switch. The switches contain similar features. The compliance constraint is varied such that the topology optimized switch performance approaches the intuitively-designed one. Finally, the importance of the compliance constraint and of the robust formulation are discussed.

Published in:

Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2012 Symposium on

Date of Conference:

25-27 April 2012