By Topic

Electrostatic curved electrode actuators

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Legtenberg, R. ; MESA Res. Inst., Twente Univ., Enschede, Netherlands ; Gilbert, J. ; Senturia, S.D. ; Elwenspoek, M.

This paper presents the design and performance of an electrostatic actuator consisting of a laterally compliant cantilever beam and a fixed curved electrode, both suspended above a ground plane. A theoretical description of the static behavior of the cantilever as it is pulled into contact with the rigid fixed-electrode structure is given. Two models are presented: a simplified semi-analytical model based on energy methods, and fully three-dimensional (3-D) coupled electromechanical numerical simulations using CoSolve-EM. The two models are in qualitative agreement with each other, and predict stable actuator behavior when the beam deflection becomes constrained by the curved electrode geometry before electrostatic pull-in can occur. The pull-in behavior depends on the shape of the curved electrode. Test devices have been fabricated by polysilicon surface micromachining techniques. Experimental results confirm the basic theoretical results. Stable behavior with relatively large displacements and forces can be generated by these curved electrode actuators. Depending on the design, or as a result of geometrical imperfections, regions of unstable (pull-in) deflection behavior are also observed

Published in:

Microelectromechanical Systems, Journal of  (Volume:6 ,  Issue: 3 )