Skip to Main Content
Hole velocity and mobility are extracted from quantum-well (QW) biaxially strained Si0.5Ge0.5 channel metal-oxide-semiconductor field-effect transistors (MOSFETs) on silicon-on-insulator wafers. Devices have been fabricated at sub-100-nm gate length with HfO2/TiN gate stacks. A significant hole mobility enhancement over the strained Si mobility curve is observed for QW MOSFETs. We also discuss the relationship between velocity and mobility of the strained SiGe channels with high Ge content for 〈100〉 and 〈110〉 crystal directions. Whereas the mobility increases by 18% for 〈100〉 with respect to 〈110〉, it translates into a modest 8% velocity increase.