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Charge to breakdown mechanism of thin ONO films

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4 Author(s)
Min Wha Park ; Goldstar Electron Corp., Seoul, South Korea ; Dae-Gwan Khang ; Jung Suk Goo ; Chan Hyeong Park

Effects of charge trapping in the thin ONO (oxide silicon nitride oxide) film caused by the voltage stress on the time-dependent dielectric breakdown (TDDB) mechanism are studied. The purpose is to report the TDDB data of the films after various treatments of charge injection and thermal annealing together with analysis of the experimental data to enhance the understanding of the dielectric breakdown mechanisms of the ONO film. It is observed that the trapped charges injected from one electrode have very little effect on the TDDB mechanism during stress to the other electrode. This suggests that the position of trapped charges may be quite different for the two injecting electrodes and that breakdown mechanisms may be initiated from the different charge positions and sources

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Electron Devices, IEEE Transactions on  (Volume:37 ,  Issue: 11 )