The effects of source/drain resistance on deep submicrometer device performance

As MOSFET channel lengths approach the deep-submicrometer regime, performance degradation due to parasitic source/drain resistance (R _sd) becomes an important factor to consider in device scaling. The effects of R_sd on the device performance of deep-submicrometer non-LDD (lightly doped drain) n-channel MOSFETs are examined. Reduction in the measured saturation drain current (R_sd=600 Ω-μm) relative to the ideal saturation current (R_sd=0.0 Ω-μm) is about 4% for L_eff=0.7 μm and T_ox =15.6 nm and 10% for L_eff=0.3 μm and T _ox=8.6 nm. Reduction of current in the linear regime and reduction of the simulated ring oscillator speed are both about three times higher. The effect of salicide technologies on device performance is discussed. Projections are made of the ultimate achievable performance