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We fabricate electrostatically defined, few-electron triple quantum dot (TQD) devices in a silicon metal-oxide-semiconductor structure and obtain stability diagrams in the few-electron regime through charge detection by a nearby quantum point contact. We demonstrate the tunability of the TQD by achieving the quadruple points where all three dots are on resonance. The tuning evolutions are shown to be consistent with a constant interaction model. We identify quantum cellular automata phenomena near the quadruple point.