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Polymer/Silicon Hard Magnetic Micromirrors

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4 Author(s)
Weber, N. ; Dept. of Microsyst. Eng. (IMTEK), Univ. of Freiburg, Freiburg im Breisgau, Germany ; Hertkorn, D. ; Zappe, H. ; Seifert, A.

Extremely compact hard magnetic micromirrors are realized using a combination of silicon and polymer microelectromechanical systems technologies. Due to their hard magnetic properties, the mirrors may achieve high deflection angles with the application of very low magnetic fields, a few microteslas, which may be generated by means of miniaturized microcoils. Since no electrical wiring is required for the mirrors, they may be mounted on rotating platforms and thus used for complete circumferential scanning, as required, for example, in optical endoscopic diagnostics.

Published in:

Microelectromechanical Systems, Journal of  (Volume:21 ,  Issue: 5 )