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Surface plasmon polariton model of high-spatial frequency laser-induced periodic surface structure generation in silicon

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5 Author(s)
Straub, M. ; Department of Biophotonics and Laser Technology, Faculty of Physics and Mechatronics, Saarland University, Campus Am Markt, Zeile 5, D-66125 Saarbrücken, Germany ; Afshar, M. ; Feili, D. ; Seidel, H.
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In recent years, high-spatial frequency laser-induced surfaces structures have been generated in a large variety of dielectrics. In silicon subwavelength ripples, some of which featured periodicities below 100 nm, were formed using ultrafast lasers. We demonstrate for Si(100) surfaces that generation of a dense electron-hole plasma in the focal spot of ultrashort-pulsed laser light followed by massive excitation of plasma waves provides an explanation for the formation of such high-spatial frequency surface structures. The applied Drude-like model includes carrier-carrier collisions and is in excellent agreement with the experimentally observed ripple period.

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Journal of Applied Physics  (Volume:111 ,  Issue: 12 )