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Josephson junctions fabricated by oxygen ion irradiation of YBa/sub 2/Cu/sub 3/O/sub 7-x/ thin films

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9 Author(s)
Hollkott, J. ; Inst. fur Halbleitertech., Aachen, Germany ; Hu, S. ; Becker, C. ; Auge, J.
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Ion irradiated microbridges are an interesting type of Josephson junction, because their technological requirements can be very low. In this paper a specialized fabrication process and the electrical characterization of the fabricated devices are reported on. The I/sub C/R/sub N/ product at 77 K is about 24 /spl mu/V. The phase coherence was proven by measurements on DC-SQUIDs made of these junctions. To get a deeper insight of the damage produced by ion irradiation, YBa/sub 2/Cu/sub 3/O/sub 7-x/, thin films have been investigated by high resolution transmission electron microscopy (HRTEM) and Rutherford backscattering spectroscopy (RBS).

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Applied Superconductivity, IEEE Transactions on  (Volume:7 ,  Issue: 2 )