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Piezoelectric MEMS low-level vibration energy harvester with PMN-PT single crystal cantilever

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10 Author(s)
Tang, G. ; Res. Inst. of Micro/Nano Sci. & Technol., Shanghai Jiao Tong Univ., Shanghai, China ; Liu, J.-Q. ; Yang, B. ; Luo, J.-B.
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A piezoelectric MEMS vibration energy harvester with PMN-PT single material has been developed, which can convert low-level vibration energy into electrical energy. Compared with the conventional piezoelectric material, the PMN-PT single crystal has a higher coupling coefficient and electromechanical coefficient, which can improve the conversion efficiency of the power generating device. The designed device consists of a composite cantilever beam and an Ni proof mass, which is fabricated using UV-LIGA technology. Test results show that the fabricated vibration energy harvester can generate a maximum output power of 2.704 W with a 2.08 VP-P output voltage, at a resonant frequency of 237.4 Hz and 1.0g acceleration level.

Published in:
Electronics Letters  (Volume:48 ,  Issue: 13 )

Date of Publication: June 21 2012

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