Cart (Loading....) | Create Account
Close category search window

Very low angle annular dark field imaging in the scanning transmission electron microscope: A versatile tool for micro- and nano-characterization

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Baumann, Frieder H. ; IBM Microelectronics Division, 2070 Route 52 Hopewell Junction, New York 12533

Your organization might have access to this article on the publisher's site. To check, click on this link: 

The author shows how very low angle annular dark field (VLAADF) imaging in the scanning transmission electron microscope (STEM) is used to delineate regions of different orientation or structural phase in the same material. First, the author describes the settings used to obtain images in which only very low indexed beams contribute to the image formation. These settings can be implemented easily on any commercial STEM/TEM by choosing the appropriate camera length and objective aperture. The author then demonstrates how VLAADF was used to perform detailed grain size studies in Cu interconnects, and show how the technique can be used to outline the amorphous region within the crystalline matrix in a phase change memory device. The author finishes by addressing and discussing the dependence of the “orientation contrast” on the main imaging parameters.

Published in:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures  (Volume:30 ,  Issue: 4 )

Date of Publication:

Jul 2012

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.