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Fabrication and characteristics of vertically stacked NbCN/MgO/NbCN Josephson junctions with thin intermediate electrodes

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7 Author(s)
T. Kikuchi ; Electrotech. Lab., Ibaraki, Japan ; S. Kiryu ; S. Kohjiro ; Q. Wang
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Vertically stacked NbCN/MgO/NbCN Josephson junctions with thin intermediate electrodes (2 nm-11 nm) have been fabricated on a wafer in a computer-controlled sputtering. The tunneling characteristics of fabricated junctions have been evaluated as functions of the number of stacks and thickness of intermediate electrodes d. As a result, it has been found that the energy gap for intermediate electrodes reduced with d linearly depending on 1/d. The junction quality parameter R/sub SG//R/sub N/ gradually decreased with d.

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IEEE Transactions on Applied Superconductivity  (Volume:7 ,  Issue: 2 )