Cart (Loading....) | Create Account
Close category search window

Analysis of electronic carrier traps in Cr-SrTiO3-based charge trap flash memory devices

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $31
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Yujeong Seo ; School of Electronics Engineering, Korea University, Seoul 136-701, South Korea ; Yeong Song, Min ; Park, Soyun ; Geun Kim, Tae

Your organization might have access to this article on the publisher's site. To check, click on this link: 

We investigated the deep-level traps formed in Cr-SrTiO3/Si3N4/SiO2 structures deposited on n-type Si by deep-level transient spectroscopy (DLTS). Three electron traps, with averaged activation energies of 0.24, 0.28, and 0.53 eV, were observed below the conduction band minimum of Si. Different behaviors in the dependence of DLTS on both filling bias and pulse confirm that the traps originate as the Si3N4 bulk trap, the Si3N4/SiO2 interfacial trap, and the Si/SiO2 interfacial trap. We also demonstrate that a specific point defect is the source of memory behavior in Cr-SrTiO3-based fusion-type charge trap flash (CTF) memory devices.

Published in:

Applied Physics Letters  (Volume:100 ,  Issue: 24 )

Date of Publication:

Jun 2012

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.