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We demonstrate the incorporation of a quadrupole electromagnet into an ultrahigh vacuum sputtering system for the vector control of induced magnetic anisotropy in magnetic thin-film heterostructures. A stationary quadrupole electromagnet is used to generate a magnetic field, which rotates synchronously with the physical axes of the substrate in situ during sputtering. An arbitrary anisotropy direction can be set for successive ferromagnetic layers by adjusting the phase difference of substrate and field rotation. The ability to rotate the substrate during deposition and change anisotropy without breaking vacuum enables the deposition of magnetically soft heterostructures with arbitrary in-plane anisotropy axes.
Published in:
Review of Scientific Instruments
(Volume:83
,
Issue:
6
)
Date of Publication: Jun 2012
- Page(s):
- 063903 - 063903-4
- ISSN :
- 0034-6748
- Digital Object Identifier :
- 10.1063/1.4725527
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 11 June 2012
- Issue Date :
- Jun 2012
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