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IMPROVE simulation tool: Integrating heterogeneous simulation modules for semiconductor manufacturing processes

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3 Author(s)
Almeida, N. ; Critical Manuf., Maia, Portugal ; Pires, J. ; Sora, D.

IMPROVE is a European project aiming to research and develop methods and tools to increase the efficiency of semiconductor production processes. Within project activities three simulation applications with disparate technical characteristics, using different technologies, were developed. Critical Manufacturing accepted the challenge of developing a tool capable of connecting these simulation modules, execute them as a continuous process and save the results for further analysis.

Published in:

Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI

Date of Conference:

15-17 May 2012