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Rules of automation for 200mm semiconductor manufacturing environment

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2 Author(s)
Heinrich, H. ; Factory Lo.gistics & Autom., Infineon Technol. Dresden GmbH, Dresden, Germany ; Deutschlander, A.

This article focuses on Infineon's consequent way to retain their European facilities by designing and building a high profitable eight inch manufacturing environment. The challenges for automation in such an environment are discussed and practical experiences are presented. Based on more than 7 years of automation experiences, we developed summarized rules of automation. We will show the advantages and benefits of our automation strategy for high volume/high mix eight inch facilities.

Published in:

Advanced Semiconductor Manufacturing Conference (ASMC), 2012 23rd Annual SEMI

Date of Conference:

15-17 May 2012