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Low-voltage, high extinction ratio carrier-depletion Mach-Zehnder silicon optical modulator

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10 Author(s)
Jianfeng Ding ; Optoelectronic System Laboratory, and State Key Lab on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, P. O. Box 912, Beijing 100083, China ; Hongtao Chen ; Ruiqiang Ji ; Lin Yang
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As a result of the low modulation efficiency of carrier-depletion Mach-Zehnder silicon optical modulator, it always needs a high voltage around 6 V, which is very difficult to supply in an integrated high-speed CMOS chip. We demonstrate a carrier-depletion Mach-Zehnder silicon optical modulator which works at a low voltage. Its coplanar waveguide electrode is carefully designed to make sure the electrical wave loss along the device is low. The device operates well at a data rate of 12.5 Gb/s, whose phase-shifter length is 2 mm. Voltages with the swinging amplitudes being 1 V and 2 V are applied to the device with the reverse bias voltages of 0.5 V and 0.8 V. The extinction ratios are 7.67 and 12.79 dB respectively.

Published in:

Communications and Photonics Conference and Exhibition, 2011. ACP. Asia

Date of Conference:

13-16 Nov. 2011