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We utilize the excellent mechanical properties of a novel material system based on GaN to fabricate a surface acoustic wave oscillator for sensor applications. We design the surface acoustic wave (SAW) sensor for GHz band to improve the device sensitivity. The time domain simulation of the oscillator with the fabricated SAW structure is successfully demonstrated. For this purpose, in simulation software HSPICE we use table-driven “s-element” two port network. The proposed sensor is fabricated and its operation is demonstrated.
Date of Conference: 17-18 April 2012