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Multilayered 3-D Optical Circuit With Mirror-Embedded Waveguide Films

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8 Author(s)
Woo-Jin Lee ; Nano-Photonics Res. Center, Korea Photonics Technol. Inst., Gwangju, South Korea ; Sung Hwan Hwang ; Myoung Jin Kim ; Eun Joo Jung
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A multilayered 3-D optical circuit is fabricated using mirror-embedded waveguide films that have optical input-output apertures on their surfaces. We fabricated the surface input-output optical waveguide films via an ultraviolet imprint method using a mirror-integrated master. To fabricate the master, waveguide patterns were formed on a silicon wafer using a deep reactive ion etching method, and 45°-angled mirror structures were then constructed on the waveguide core patterns via a V-sawing technique. We subsequently manufactured a multilayered optical circuit layer by layer, before measuring its optical characteristics. The input beam inserted onto the surface of the circuit was emitted through 2 × 2 arrayed surface output apertures after propagating along the 3-D beam path.

Published in:

Photonics Technology Letters, IEEE  (Volume:24 ,  Issue: 14 )