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Deflection Sensitivity Calibration of Heated Microcantilevers Using Pseudo-Gratings

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3 Author(s)
Jungchul Lee ; Dept. of Mech. Eng., Sogang Univ., Seoul, South Korea ; Bong Jae Lee ; King, W.P.

We report a technique to calibrate the sensitivity of sensor-integrated atomic force microscope cantilevers using pseudo-gratings. An offset signal superposed onto the cantilever control signal modulates the cantilever position over a flat surface, driving the cantilever toward and away from the surface in a controlled way. The relationship between the cantilever sensor signal and displacement provides the cantilever calibration. We show how this technique can be used to calibrate heated microcantilever sensors.

Published in:

Sensors Journal, IEEE  (Volume:12 ,  Issue: 8 )

Date of Publication:

Aug. 2012

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