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Tilted c -Axis Thin-Film Bulk Wave Resonant Pressure Sensors With Improved Sensitivity

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3 Author(s)
Anderas, E. ; Solid State Electron. Dept., Uppsala Univ., Uppsala, Sweden ; Katardjiev, I. ; Yantchev, Ventsislav M.

Aluminum nitride thin-film bulk wave resonant pressure sensors employing c- and tilted c-axis texture, have been fabricated and tested for their pressure sensitivities. The c-axis tilted film bulk acoustic resonators pressure sensors demonstrate substantially higher-pressure sensitivity compared to its c-axis oriented counterpart. More specifically, the thickness plate quasi-shear resonance has demonstrated the highest pressure sensitivity while further being able to preserve its performance in liquid environment.

Published in:

Sensors Journal, IEEE  (Volume:12 ,  Issue: 8 )