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A Multiloop SQUID and a SQUID Array With 1- \mu \hbox {m} and Submicrometer Input Coils

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3 Author(s)
Kiviranta, M. ; VTT Technol. Res. Centre of Finland, Espoo, Finland ; Gronberg, L. ; Hassel, J.

We have constructed a niobium multiloop SQUID current sensor and a 60-SQUID series array as a mix-and-match fabrication experiment utilizing our in-house projection stepper. The multiloop SQUID includes an input coil with a linewidth of 0.8 μm and a pitch of 1.6 μm, resulting in the mutual inductance M-1 = 1.8 μA/Φ0. The SQUID array is built on the same chip as the second-stage amplifier. The array and the multiloop showed white flux noise of 0.2 and 0.8 μΦ0 Hz-1/2 at 4.2 K, respectively. Owing to the well-balanced gradiometric narrow-line construction, the two-SQUID system can be cooled down in the Earth's magnetic field and can be operated without superconducting or mu-metal shields. Excess low frequency noise was observed, whose possible origin in Josephson dynamics has been briefly studied with numerical simulation.

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Applied Superconductivity, IEEE Transactions on  (Volume:22 ,  Issue: 4 )