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This paper presents a novel bi-stable and integrated single use MEMS blowout switch based on electro-thermal theory. The switch mechanically breaks a metallic line. Switching between the two stable states is accomplished by a DC signal through an integrated heating resistance underneath the electrical lines to be melted. Some key features are that switches are bi-stable, integratable and IC compatible. They are compatible with various voltages operation for different applications, operation in ambient environment may be possible; predicted lifetime is very long and therefore both switches can be used for long life systems. Batch fabrication using planar processing methods is used. The ETBS could be manufacture easily in great amount. The switch can also be applied in some areas of high-energy control such as initiation security and self-control in failure.
Date of Conference: 5-8 March 2012