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Development of roll press UV imprint process for replication of micro lens array on the large and thin quartz substrate

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5 Author(s)
Li, L. ; Major in Nano-Sci. & Nano-Eng., Waseda Univ., Tokyo, Japan ; Ishii, K. ; Tsutsui, Y. ; Shoji, S.
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In this study, micro lens arrays (MLAs) fabrication process was carried out using flexible replica mold and an original roll press UV imprint system. We successfully demonstrated MLAs fabrication process with high throughput. The lens patterns of 30 × 100 mm2 in area replicated by two photo-curable resins were formed on the quartz substrate of 0.15 mm in thickness. This fabrication process is applicable for MLAs fabrication of next generation optical devices.

Published in:

Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on

Date of Conference:

5-8 March 2012

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