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Two magnetic phases in the co-sputtered Fe-Si3N4 thin film

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5 Author(s)
S. M. Han ; Dept. of Phys., Chung-Buk Nat. Univ., Cheongju, South Korea ; S. C. Yu ; W. T. Kim ; S. H. Han
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The structure and magnetic properties of Fe-Si3N4 thin films fabricated by a co-sputtering technique were studied by X-ray diffractometry and magnetometry. With increasing area fraction of Si3N4 pieces on the Fe target, magnetization of the films decreased due to reduced Fe content and reduced grain size of the bcc crystalline phase. The temperature dependence and field dependence of magnetization of co-sputtered thin films can be explained by a mixture of two types of particles showing paramagnetism and ferromagnetism

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IEEE Transactions on Magnetics  (Volume:33 ,  Issue: 5 )