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Novel fabrication process for transverse and longitudinal mode PZT actuators

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4 Author(s)
Misri, I. ; Mech. Eng., Univ. of Maryland, College Park, MD, USA ; Hareesh, P. ; Shuang Yang ; DeVoe, D.L.

Bulk PZT sheets are patterned using micro powder blasting and a dry film photoresist to fabricate functional piezoelectric actuators. Etch characterization of bulk PZT is reported for improved powder blasting parameters. Using this information, PZT actuators are successfully fabricated and tested. The developed method described offers great potential for future bulk PZT transducers, as it provides relatively high resolutions, a reduced etch time, and simple implementation.

Published in:

Microsystems for Measurement and Instrumentation (MAMNA), 2012

Date of Conference:

27-27 March 2012