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Integrated cavity optomechanical sensors for atomic force microscopy

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4 Author(s)
Yuxiang Liu ; Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA ; Houxun Miao ; Aksyuk, V. ; Srinivasan, K.

We present the development of cavity optomechanical sensors that integrate nanoscale cantilevers for mechanical transduction with optical resonators used for motional readout. The cantilever stiffness was varied over 4 orders of magnitude (from ≈0.01 N/m to ≈290 N/m) by simply modifications to the device geometry. The observed displacement sensitivity (fm/(Hz)^(1/2)), near-field readout scheme, and integrated nature suggest that the sensors are promising for use in stable, high-bandwidth AFM applications.

Published in:

Microsystems for Measurement and Instrumentation (MAMNA), 2012

Date of Conference:

27-27 March 2012