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Experimental and simulation study of undesirable short-period deformation in piezoelectric deformable x-ray mirrors

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10 Author(s)
Nakamori, Hiroki ; Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan ; Matsuyama, Satoshi ; Imai, Shota ; Kimura, Takashi
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To construct adaptive x-ray focusing optics whose optical parameters can be varied while performing wavefront correction, ultraprecise piezoelectric deformable mirrors have been developed. We computationally and experimentally investigated undesirable short-period deformation caused by piezoelectric actuators adhered to the substrate during mirror deformation. Based on the results of finite element method analysis, shape measurements, and the observation of x-ray reflection images, a guideline is developed for designing deformable mirrors that do not have short-period deformation errors.

Published in:

Review of Scientific Instruments  (Volume:83 ,  Issue: 5 )

Date of Publication:

May 2012

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