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A domain decomposition method for the simulation of fracture in polysilicon MEMS

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4 Author(s)
Federica Confalonieri ; Department of Structural Engineering, Politecnico di Milano, Piazza Leonardo da Vinci 32, Milan, Italy ; Giuseppe Cocchetti ; Aldo Ghisi ; Alberto Corigliano

In this paper, a domain decomposition approach is proposed to efficiently address the finite element simulation of fracture phenomena in polysilicon MEMS under impact dynamics. The analysis is performed at the microscale, i.e. at the level of the microstructural parts composing the microsystem, in order to simulate local failure mechanisms developing in critical regions.

Published in:

Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE), 2012 13th International Conference on

Date of Conference:

16-18 April 2012