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This paper gives insight into nanorobotic handling and electrical characterization of silicon nanowires (SiNWs) inside a scanning electron microscope. The synthesis of metal-assisted etched both end doped SiNWs is presented. Several nanorobotic pick and place strategies for handling individual nanowires are discussed. Key approaches such as force-based and adhesive bonding (focus ion and electron beam induced deposition) have been realized experimentally and evaluated toward their suitability for automation. Preliminary results on electrical characterization are presented.
Date of Publication: June 2013