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A Batch-Fabricated Single-Layer Elastomeric Actuator With Corrugated Surface

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4 Author(s)
Maleki, T. ; Birck Nanotechnol. Center, Purdue Univ., West Lafayette, IN, USA ; Chitnis, G. ; Kim, A. ; Ziaie, B.

In this paper, we report on the first lasermicromachined batch-fabricated single-layer elastomeric actuator with a corrugated surface profile. The structural material of the cantilever actuator is a single [polydimethylsiloxane (PDMS)] layer, and electrodes are soft lithographically patterned conductive carbon grease. The asymmetric corrugated surface provides a bending moment in a single PDMS layer without the need for a second inactive layer. An actuator which is 5 mm long, 1 mm wide, and 80 μm thick can generate up to 2-mm out-of-plane displacement with zero applied force and 15 μN at zero deflection while consuming 20 μW of static power when actuated with 500 V.

Published in:

Microelectromechanical Systems, Journal of  (Volume:21 ,  Issue: 4 )