This paper describes novel glass micropipette thermal sensor fabricated in a cost-effective manner and thermal conductivity measurement of carbon nanotubes (CNT) thin film using the developed sensor. Various micrometer-sized sensors, which range from 2 μm to 30 μm, were produced and tested. The capability of the sensor in measuring thermal fluctuation at micro level with an accuracy of ±0.01°C is demonstrated. We have obtained reproducible thermal conductivity data using various micropipette temperature sensors. The average thermal conductivity of the CNT film at room temperature was determined at 73.4 W/m°C.
Published in:
Semiconductor Thermal Measurement and Management Symposium (SEMI-THERM), 2012 28th Annual IEEE
Date of Conference: 18-22 March 2012