Scheduled System Maintenance:
On Monday, April 27th, IEEE Xplore will undergo scheduled maintenance from 1:00 PM - 3:00 PM ET (17:00 - 19:00 UTC). No interruption in service is anticipated.
By Topic

Silicon microholes array fabricated by femtosecond laser pulses directly writing assisted with further electrochemical etching

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

9 Author(s)
Zhongyi Guo ; Dept. of Chem. Eng., Hanyang Univ., Ansan, South Korea ; Keya Zhou ; Yanjun Xiao ; Jung, Jin-Young
more authors

Silicon microholes array have been fabricated using femtosecond laser directly writing followed by electrochemical etching in a hydrofluoric acid (HF) and the isopropyl alcohol ((CH3)2CHOH) solution. Firstly, the micro size scratches array were directly written on a surface of the n-type, 1-5 Ωcm, Si(100) wafer by using the femtosecond laser pulses. Shallow micro holes array could be obtained on the wafer surface. Then, the as-fabricated sample with shallow micro holes array was further etched electrochemically in HF and (CH3)2CHOH solution. During this step, the depth of the shallow microholes array could be greatly enlarged because of the focusing effect by the prefabricated microholes array. Finally, optical characteristics of the fabricated silicon microholes (SiMHs) array at different stages demonstrate that the reflections of the fabricated samples have been greatly reduced compared to that of a silicon wafer. Our method suggests the effectiveness of SiMHs array on a silicon wafer for obtaining the enhanced optical absorption and potential application for fabricating a special radial p-n junction solar cell.

Published in:

Photovoltaic Specialists Conference (PVSC), 2011 37th IEEE

Date of Conference:

19-24 June 2011