MeV Energy $\hbox{N}^{+}$-Implanted Planar Optical Waveguides in Er-Doped Tungsten-Tellurite Glass Operating at 1.55 $\mu\hbox{m}$

We report on the fabrication and characterization of planar waveguides in an Er-doped tungsten-tellurite glass by implantation of 3.5 MeV N
⁺
ions. Implantations were carried out in a wide fluence range of 1·10
¹⁶
÷8 ·10
¹⁶
ions/cm
²
. Waveguides were characterized by m-line spectroscopy and spectroscopic ellipsometry. Irradiation-induced refractive index modulation saturated around a fluence of 8 ·10
¹⁶
ions/cm
²
. Waveguides operating at 1550 nm were obtained in that material using 3.5 MeV N
⁺
ion implantation.