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High-performance photonic crystal device fabrication process module development for photonics application

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4 Author(s)
Deng Wei ; Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), 11 Science Park Road, Singapore Science Park II, Singapore 117685 ; X. S. Luo ; Ng Leekian ; Yu Mingbin

We have developed a CMOS compatible fabrication process module for the controllable fabrication of high-performance photonic crystal devices using deep-UV photolithography. We will show the high-performance photonic crystal waveguides with air isolation trench underneath in order to achieve better light confinement. The demonstrated photonic crystal waveguides show only 8 dB/mm propagation loss.

Published in:

Electronics Packaging Technology Conference (EPTC), 2011 IEEE 13th

Date of Conference:

7-9 Dec. 2011