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A 2-DOF Electrostatically Actuated MEMS Nanopositioner for On-Chip AFM

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4 Author(s)
Fowler, A.G. ; Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle Australia, Callaghan, NSW, Australia ; Laskovski, A.N. ; Hammond, A.C. ; Moheimani, S.O.R.

A new 2-DOF microelectromechanical systems (MEMS)-based parallel kinematic nanopositioner with electrostatic actuation is presented. The device has been designed, fabricated, and implemented using the silicon-on-insulator-based MEMSCAP SOIMUMPs process. Experimental characterization shows that in-plane displacements in excess of 15 μm are achievable and that the first resonant mode along each axis is located at approximately 820 Hz. The nanopositioner's use in a practical application is demonstrated, with the device being used as the scanning stage during an atomic force microscope scan.

Published in:

Microelectromechanical Systems, Journal of  (Volume:21 ,  Issue: 4 )