Referenced Items are not available for this document.
We investigated the influence of the magnetic permeabilities of the magneto-optical (MO) tertiary TbFeCo targets. Films were sputter-deposited by using a magnetron rf-dc sputtering system. Target B with a low magnetic permeability (5) was found favorable with regard to the target use efficiency (35%), and the uniform film thickness in the range of 1975 Å to 2015 Å over a substrate of 130 mn in diameter, compared to Target A with a high magnetic permeability (40). The difference of the Tb content between the sputtered thin films and Target B was found narrower than that of the Tb content between the sputtered thin films and Target A. A low motor current was needed to rotate the magnet placed below Target B during the magnetron-sputtering
Published in:
Magnetics, IEEE Transactions on
(Volume:33
,
Issue:
5
)
Date of Publication: Sep 1997
- Page(s):
- 3271 - 3273
- ISSN :
- 0018-9464
- INSPEC Accession Number:
- 5726868
- Digital Object Identifier :
- 10.1109/20.617914
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 August 2002
- Issue Date :
- Sep 1997
- Sponsored by :
- IEEE Magnetics Society
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