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A systematic study of a-CNx overcoat film for proximity recording

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4 Author(s)
Bing Zhang ; MaxMedia Div., Hyundai Electron. America, San Jose, CA, USA ; Bo Wei ; D. J. D. Sullivan ; H. E. Gotts

This paper takes a systematic approach to study the correlation between the film growth processes and mechanical properties of amorphous carbon nitride overcoat films for proximity recording. The film properties were characterized by resistivity measurements, Raman spectroscopy, Auger and XPS depth profiling, and high resolution XPS scans of C1s and N1s core level bond energies. Results from these characterization methods can be correlated to the sputtering process parameters and the tribological scratch performance of the films

Published in:

IEEE Transactions on Magnetics  (Volume:33 ,  Issue: 5 )