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Inline Measurement of Adhesion Force Using Electrostatic Actuation and Capacitive Readout

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5 Author(s)
Shavezipur, M. ; Dept. of Electr. Eng., Stanford Univ., Stanford, CA, USA ; Gou, W. ; Fisch, M. ; Carraro, C.
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A microinstrument with electrostatic actuation and capacitive readout for the measurement of adhesion force is introduced that can be used in packaged systems for the in-line characterization and monitoring of fabricated devices. The test results for different apparent contact areas obtained using these devices are in agreement with previously reported values for adhesion force obtained via optical readout and display a weak correlation between the apparent contact area and the adhesion force.

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Microelectromechanical Systems, Journal of  (Volume:21 ,  Issue: 4 )