Design of Micromachined Vibratory Gyroscope With Two Degree-of-Freedom Drive-Mode and Sense-Mode

In this paper, a novel micromachined vibratory gyroscope is proposed, where a two degree-of-freedom (2-DOF) architecture with two masses and three springs is utilized in both drive-mode and sense-mode. The 2-DOF dynamic structure provides the inherently robustness of both modes against structural and environmental variations. The proposed gyroscope demonstrates drive-mode 3-dB bandwidth of 190 Hz and sense-mode 3-dB bandwidth of 300 Hz at the operational frequency 5.0 kHz. The simulation results confirmed that the resonant frequency and bandwidth of the drive-mode are highly matched with those of sense-mode in the region of 4.90–5.09 kHz. So the gyroscope can be operated robustly in the region of 4.90–5.09 kHz. The proposed device can also be started quickly and suppress the pulse noise.