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Experimental Investigation of Thermally Induced Nonlinearities in Aluminum Nitride Contour-Mode MEMS Resonators

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3 Author(s)
Augusto Tazzoli ; Department of Electrical and Systems Engineering, University of Pennsylvania, Philadelphia, PA, USA ; Matteo Rinaldi ; Gianluca Piazza

The aim of this letter is to experimentally demonstrate that the source of amplitude-frequency (A-f) nonlinearities in aluminum nitride contour-mode MEMS resonators is to be attributed to the softening of the equivalent device Young's modulus due to self-heating effects. Resonators with a center frequency of about 1.16 GHz are here investigated as a case study. The resonator self-heating was evaluated by integrating a platinum serpentine in the resonator body and using it as an efficient temperature sensor. The observations of this work are supported by the comparison of the shift of the A-f plots measured at different ambient temperatures with the direct recording of the resonator-temperature increase during VNA frequency sweeps.

Published in:

IEEE Electron Device Letters  (Volume:33 ,  Issue: 5 )