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Development of flexure based 6-degrees of freedom parallel nano-positioning system with large displacement

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2 Author(s)
Dongwoo Kang ; Advanced Manufacturing Systems Research Division, Korea Institute of Machinery and Materials, 156 Gajeongbuk-Ro, Yuseong-Gu, Daejeon 305-343, Korea ; Daegab Gweon

Your organization might have access to this article on the publisher's site. To check, click on this link:http://dx.doi.org/+10.1063/1.3693345 

This paper details the development of a novel flexure jointed precision parallel nano-positioning system in combination with piezo-electric stepping motor for the application of precise optics alignment. The characteristics of the developed system are evaluated in this paper by the simulation and experiments. Based on the precision piezo-electric stepping motor and flexure joints, a high precision motion is obtained. Results of this paper include that of a translation resolution of 15 nm and a rotational resolution of 0.14 arc sec being achieved. In addition, the piezo-electric stepping motors provide a power-off hold characteristic to the system. Meanwhile, the parallel structure provides the high dynamic bandwidth of the lowest resonant frequency of 396.1 Hz. The symmetric structure is advantageous for thermal variation. To increase the motion range of the system, all of flexure joints are designed specially and the coupled workspace of ±2 mm × ±2 mm × ±2 mm × ±2° × ±2° × ±2° is achieved. The overall size of the designed system is Φ350 mm × 120 mm.

Published in:

Review of Scientific Instruments  (Volume:83 ,  Issue: 3 )

Date of Publication:

Mar 2012

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