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Experimental estimation of cooling power of a solid state micro magnetic refrigerator using La(FexSi1−x)13Hy

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3 Author(s)
Tsukamoto, T. ; Dept. of Nanomech., Tohoku Univ., Sendai, Japan ; Esashi, M. ; Tanaka, S.

We demonstrated microscale cooling by a solid state micro magnetic refrigerator (SSMMR). The SSMMR consists of thermally isolated magnetic material (La(FexSi1-x)13Hy), two thermal switches and a magnetic field switch. Thermal isolation structure and thermal switch were fabricated using MEMS fabrication process. The magnetic field switch were designed and fabricated to change the magnetic flux density between 0 T and 1 T. Under this magnitude of magnetic field modulation, the La(FexSi1-x)13Hy showed a temperature change of ca. 1 °C. By the refrigeration cycle, about 0.6 °C cooling effect was observed on the thermally isolated cold plate. From these results, the estimated cooling power of the SSMMR was ca. 9 μW.

Published in:

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Date of Conference:

Jan. 29 2012-Feb. 2 2012