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Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical spring

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4 Author(s)
Jungwook Choi ; Sch. of Mech. Eng., Yonsei Univ., Seoul, South Korea ; Soonjae Pyo ; Jae-Ik Lee ; Jongbaeg Kim

We have demonstrated length-controllable in-plane synthesis of aligned carbon nanotube (CNT) array on microfabricated structures using micromechanical springs. The micromechanical spring provides precise compressive stress during the chemical vapor deposition process for CNT growth. Different loading results in different final length of the CNT array, as well as different alignment and defectiveness of the individual CNT. The length and the alignment of CNT array according to the spring stiffness were measured inside scanning electron microscope. The defectiveness of CNT was examined using micro-Raman spectroscopy, and the intensity ratio between D- and G-band was analyzed.

Published in:

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Date of Conference:

Jan. 29 2012-Feb. 2 2012

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