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Direct-write single-walled carbon nanotube serpentines using micro chemical vapor deposition

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3 Author(s)
Qin Zhou ; Berkeley Sensor and Actuator Center, Department of Mechanical Engineering, University of California at Berkeley ; Jiming Huang ; Liwei Lin

This work presents the capability to grow and deposit single-walled carbon nanotubes (SWNTs) with good position and orientation control toward fully controlled nanomanufacturing. A miniaturized growth platform as the micro chemical vapor deposition system is built by a micromachining process for the synthesis of SWNTs. A collector substrate is placed 50 microns above the growth platform for the depositions of SWNTs. The movements of the collector are continuously controlled by an x-y nanopositioner. Experimentally, depositions of SWNTs in serpentine-shape have been demonstrated. A growth model is proposed and supported by results from various guiding gas flow rates and substrate movements.

Published in:

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Date of Conference:

Jan. 29 2012-Feb. 2 2012