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Package-induced temperature dependence of MEMS capacitive strain sensor and system design considerations

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3 Author(s)
Young, D.J. ; Univ. of Utah, Salt Lake City, UT, USA ; Suster, M.A. ; Ko, W.H.

MEMS capacitive strain sensors are attractive for a wide range of industrial sensing applications due to their high sensitivity, large dynamic range and low temperature dependence. However, after sensors packaging and attachment to a targeted metallic surface, the overall sensing system can exhibit a substantial package-induced temperature dependence caused by different thermal expansion coefficients of silicon, metallic surface and bonding adhesives, thus degrading overall performance. Temperature characterization from -20°C to 150°C of prototype strain sensing modules attached on a stainless steel surface reveals a temperature dependence of -6.2 με/°C. As a results, an increased dynamic range of the sensing electronics are required at the expense of an increased system supply voltage as well as power dissipation. A careful system characterization over the operating temperature range and optimized system design considerations are, therefore, critical for achieving stringent performance requirements.

Published in:

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Date of Conference:

Jan. 29 2012-Feb. 2 2012