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A silicon nitride optomechanical oscillator with zero flicker noise

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3 Author(s)
S. Tallur ; OxideMEMS Laboratory, Cornell University, Ithaca, NY - USA ; S. Sridaran ; S. A. Bhave

We present an integrated chip-scale Radiation-Pressure driven Opto-Mechanical Oscillator (RP-OMO) in silicon nitride with excellent close-to-carrier phase noise. We illustrate a process to micro-fabricate optomechanical resonators, waveguides and grating couplers in silicon nitride and demonstrate an RP-OMO operating at 41.95MHz, with phase noise of -85dBc/Hz at 1kHz offset. The phase noise does not show 1/f3 or other higher order slopes all the way down to 10Hz offset from carrier. Using a lower optical quality factor resonance, we demonstrate improvement of 6dB in phase noise.

Published in:

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Date of Conference:

Jan. 29 2012-Feb. 2 2012