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The following topics are dealt with: optical MEMS; RF MEMS; power MEMS; microactuators; bio microsystem; medical microsystem; chemical microsensors; microfluidic components; gyroscopes; nanomaterials; fabrication technology; and biosensors.

Published in:

Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International Conference on

Date of Conference:

Jan. 29 2012-Feb. 2 2012