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Integration of thin film giant magnetoimpedance sensor and surface acoustic wave transponder

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4 Author(s)
Bodong Li ; Physical Sciences and Engineering Division, King Abdullah University of Science and Technology, 4700 KAUST, Thuwal 23955, Saudi Arabia ; Salem, Nedime Pelin M.H. ; Giouroudi, Ioanna ; Kosel, J.

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Passive and remote sensing technology has many potential applications in implantable devices, automation, or structural monitoring. In this paper, a tri-layer thin film giant magnetoimpedance (GMI) sensor with the maximum sensitivity of 16%/Oe and GMI ratio of 44% was combined with a two-port surface acoustic wave (SAW) transponder on a common substrate using standard microfabrication technology resulting in a fully integrated sensor for passive and remote operation. The implementation of the two devices has been optimized by on-chip matching circuits. The measurement results clearly show a magnetic field response at the input port of the SAW transponder that reflects the impedance change of the GMI sensor.

Published in:

Journal of Applied Physics  (Volume:111 ,  Issue: 7 )